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Items where Person is "McLane-G-F"

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Jump to: 1994
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1994

McLane, G. F. and Casas, L. and Reid, J. S. et al. (1994) Reactive ion etching of Ta–Si–N diffusion barriers in CF_(4)+O_(2). Journal of Vacuum Science and Technology B, 12 (4). pp. 2352-2355. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:20120306-151931971

This list was generated on Thu May 23 21:24:34 2019 PDT.