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Items where Person is "Muller-R-S"

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Number of items: 21.

2011

Garmire, David and Choo, Hyuck and Muller, Richard S. et al. (2011) Integrated MEMS metrology device using complementary measuring combs. Patent number: US 8,079,246. http://resolver.caltech.edu/CaltechAUTHORS:20151029-165522961

2010

Choo, Hyuck and Muller, Richard S. (2010) Optical switch using frequency-based addressing in a microelectromechanical systems array. Patent number: US 7,656,568. http://resolver.caltech.edu/CaltechAUTHORS:20151104-154140477

2009

Choo, Hyuck and Garmire, David and Muller, Richard S. et al. (2009) Method for fabricating vertically-offset interdigitated comb actuator device. Patent number: US 7,573,022. http://resolver.caltech.edu/CaltechAUTHORS:20151104-153631368

Choo, Hyuck and Muller, Richard S. and Garmire, David et al. (2009) MEMS-based, phase-shifting interferometer. Patent number: US 7,564,559. http://resolver.caltech.edu/CaltechAUTHORS:20151104-160949584

2008

Choo, Hyuck and Muller, Richard S. (2008) Optical system applicable to improving the dynamic range of Shack-Hartmann sensors. Patent number: US 7,355,793. http://resolver.caltech.edu/CaltechAUTHORS:20151104-162038645

2007

Choo, Hyuck and Muller, Richard S. (2007) Devices, Structures, and Processes for Optical MEMS. IEEJ Transactions on Electrical and Electronic Engineering, 2 (3). pp. 216-231. ISSN 1931-4981. http://resolver.caltech.edu/CaltechAUTHORS:20150804-110005309

Choo, Hyuck and Garmire, David and Demmel, James et al. (2007) Simple Fabrication Process for Self-Aligned, High-Performance Microscanners—Demonstrated Use to Generate a 2-D Ablation Pattern. Journal of Microelectromechanical Systems, 16 (2). pp. 260-268. ISSN 1057-7157. http://resolver.caltech.edu/CaltechAUTHORS:20150731-104702779

Kant, R. and Garmire, D. and Choo, H. et al. (2007) Characterization of an Improved, Real-Time MEMS-Based Phase-Shifting Interferometer. In: 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics. IEEE , Piscataway, NJ, pp. 57-58. ISBN 978-1-4244-0641-8 . http://resolver.caltech.edu/CaltechAUTHORS:20150731-110953413

Garmire, D. and Choo, H. and Kant, R. et al. (2007) Diamagnetically Levitated MEMS Accelerometers. In: TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference. IEEE , Piscataway, NJ, pp. 1203-1206. ISBN 1-4244-0842-3 . http://resolver.caltech.edu/CaltechAUTHORS:20150731-110120088

2006

Choo, Hyuck and Muller, Richard S. (2006) Addressable Microlens Array to Improve Dynamic Range of Shack–Hartmann Sensors. Journal of Microelectromechanical Systems, 15 (6). pp. 1555-1567. ISSN 1057-7157. http://resolver.caltech.edu/CaltechAUTHORS:20150730-165049120

Kim, Jongbaeg and Choo, Hyuck and Lin, Liwei et al. (2006) Microfabricated Torsional Actuators Using Self-Aligned Plastic Deformation of Silicon. Journal of Microelectromechanical Systems, 15 (3). pp. 553-562. ISSN 1057-7157. http://resolver.caltech.edu/CaltechAUTHORS:20150730-165132033

2005

Choo, H. and Garmire, D. and Demmel, J. et al. (2005) A simple process to fabricate self-aligned, high-performance torsional microscanners; demonstrated use in a two-dimensional scanner. In: IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005. IEEE , Piscataway, NJ, pp. 21-22. ISBN 0-7803-9278-7 . http://resolver.caltech.edu/CaltechAUTHORS:20150730-164608152

2004

Choo, Hyuck and Muller, Richard S. (2004) Addressable Microlens Array to Improve Dynamic Range of Shack-Hartmann Sensors. In: Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head Island, South Carolina, June 6-10, 2004 : technical digest. Transducers Research Foundation , Cleveland, OH. ISBN 0964002450 . http://resolver.caltech.edu/CaltechAUTHORS:20150915-164937836

2003

Gupta, Kishnan and Choo, Hyuck and Kim, Hanjun et al. (2003) Micromachined Polarization Beam Splitters for the Visible Spectrum. In: 2003 IEEE/LEOS International Conference on Optical MEMS. IEEE , Piscataway, NJ, pp. 171-172. ISBN 0-7803-7830-X . http://resolver.caltech.edu/CaltechAUTHORS:20150730-163529431

Kim, Jongbaeg and Choo, Hyuck and Lin, Liwei et al. (2003) Microfabricated torsional actuator using self-aligned plastic deformation. In: 12th International Conference on TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems 2003. Vol.2. IEEE , Piscataway, NJ, pp. 1015-1018. ISBN 0-7803-7731-1 . http://resolver.caltech.edu/CaltechAUTHORS:20150730-144046651

Choo, Hyuck and Muller, Richard S. (2003) Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology. In: 2003 IEEE/LEOS International Conference on Optical MEMS. IEEE , Piscataway, NJ, pp. 169-170. ISBN 0-7803-7830-X . http://resolver.caltech.edu/CaltechAUTHORS:20150730-161445697

1990

Tai, Yu-Chong and Muller, Richard S. (1990) Measurement of Young's modulus on microfabricated structures using a surface profiler. In: 1990 Proceedings on Micro electro mechanical systems: an investigation of micro structures, sensors, actuators, machines, and robots. IEEE , New York, NY, pp. 147-152. ISBN 756578224. http://resolver.caltech.edu/CaltechAUTHORS:20120509-154113327

1989

Tai, Yu-Chong and Fan, Long-Sheng and Muller, Richard S. (1989) IC-processed micro-motors: design, technology, and testing. In: 1989 Micro electro mechanical systems: an investigation of micro structures, sensors, actuators, machines and robots. IEEE , Piscataway, NJ, pp. 1-6. http://resolver.caltech.edu/CaltechAUTHORS:20120517-094304531

1988

Fan, Long-Sheng and Tai, Yu-Chong and Muller, Richard S. (1988) IC-processed electrostatic micro-motors. In: Technical Digest., International Electron Devices Meeting. IEEE , Piscataway, NJ, pp. 666-669. http://resolver.caltech.edu/CaltechAUTHORS:20190429-151824840

Tai, Y. C. and Muller, R. S. (1988) Fracture strain of LPCVD polysilicon. In: 1988 IEEE Solid-State Sensor and Actuator Workshop, Technical Digest. IEEE , Piscataway, NJ, pp. 88-91. ISBN 47874515. http://resolver.caltech.edu/CaltechAUTHORS:20120607-142008892

Fan, Long-Sheng and Tai, Yu-Chong and Muller, Richard S. (1988) Integrated movable micromechanical structures for sensors and actuators. IEEE Transactions on Electron Devices, 35 (6). pp. 724-730. ISSN 0018-9383. http://resolver.caltech.edu/CaltechAUTHORS:FANieeeted88

This list was generated on Tue Jul 16 12:37:45 2019 PDT.