| Login |
Items where Person is "Pokela-P-J"
Number of items: 3. KKolawa, E. and Chen, J. S. and Reid, J. S. et al. (1991) Tantalum-based diffusion barriers in Si/Cu VLSI metallizations. Journal of Applied Physics, 70 (3). pp. 1369-1373. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:KOLjap91 PPokela, P. J. and Reid, J. S. and Kwok, C.-K. et al. (1991) Thermal oxidation of amorphous ternary Ta36Si14N50 thin films. Journal of Applied Physics, 70 (5). pp. 2828-2832. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:POKjap91 VVu, Quat T. and Pokela, P. J. and Garden, C. L. et al. (1990) Thermal oxidation of reactively sputtered amorphous W_(80)N_(20) films. Journal of Applied Physics, 68 (12). pp. 6420-6423. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:20120509-153900631 |
