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Items where Person is "Shearn-M"

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Jump to: 2010 | 2009 | 2007
Number of items: 5.

2010

Henry, M. David and Shearn, Michael and Scherer, Axel (2010) Ga+ beam lithography for suspended lateral beams and nanowires. Journal of Vacuum Science and Technology B, 28 (6). C6F26-C6F30. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:20110315-095855621

Shearn, Michael and Sun, Xiankai and Henry, M. David et al. (2010) Advanced Plasma Processing: Etching, Deposition, and Wafer Bonding Techniques for Semiconductor Applications. In: Semiconductor Technologies. InTech , pp. 79-104. ISBN 978-953-307-080-3. http://resolver.caltech.edu/CaltechAUTHORS:20121119-082717239

2009

Shearn, Michael and Diest, Kenneth and Sun, Xiankai et al. (2009) Advanced silicon processing for active planar photonic devices. Journal of Vacuum Science and Technology B, 27 (6). pp. 3180-3182. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:20100114-152003679

Briggs, Ryan M. and Shearn, Michael and Scherer, Axel et al. (2009) Wafer-bonded single-crystal silicon slot waveguides and ring resonators. Applied Physics Letters, 94 (2). Art. No. 021106. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:BRIapl09

2007

Broeke, Ronald G. and Cao, Jin and Ji, Chen et al. (2007) Optical-CDMA in InP. IEEE Journal of Selected Topics in Quantum Electronics, 13 (5, par). pp. 1497-1507. ISSN 1077-260X. http://resolver.caltech.edu/CaltechAUTHORS:BROieeejstqe07

This list was generated on Sun May 19 19:00:07 2019 PDT.