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Items where Person is "Shearn-M"

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Number of items: 5.


Henry, M. David and Shearn, Michael and Scherer, Axel (2010) Ga+ beam lithography for suspended lateral beams and nanowires. Journal of Vacuum Science and Technology B, 28 (6). C6F26-C6F30. ISSN 1071-1023.

Shearn, Michael and Sun, Xiankai and Henry, M. David et al. (2010) Advanced Plasma Processing: Etching, Deposition, and Wafer Bonding Techniques for Semiconductor Applications. In: Semiconductor Technologies. InTech , pp. 79-104. ISBN 978-953-307-080-3.


Shearn, Michael and Diest, Kenneth and Sun, Xiankai et al. (2009) Advanced silicon processing for active planar photonic devices. Journal of Vacuum Science and Technology B, 27 (6). pp. 3180-3182. ISSN 1071-1023.

Briggs, Ryan M. and Shearn, Michael and Scherer, Axel et al. (2009) Wafer-bonded single-crystal silicon slot waveguides and ring resonators. Applied Physics Letters, 94 (2). Art. No. 021106. ISSN 0003-6951.


Broeke, Ronald G. and Cao, Jin and Ji, Chen et al. (2007) Optical-CDMA in InP. IEEE Journal of Selected Topics in Quantum Electronics, 13 (5, par). pp. 1497-1507. ISSN 1077-260X.

This list was generated on Thu May 13 14:16:40 2021 PDT.