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Items where Person is "Vladimirsky-Y"

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Jump to: 2000 | 1998

Number of items: 2.

2000

Chasiotis, Ioannis and Knauss, Wolfgang G. (2000) Microtensile tests with the aid of probe microscopy for the study of MEMS materials. In: Materials and Device Characterization in Micromachining III. Proceedings of SPIE. No.4175. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 96-103. ISBN 9780819438317. https://resolver.caltech.edu/CaltechAUTHORS:20181204-132724650

1998

Chasiotis, Ioannis and Knauss, Wolfgang G. (1998) Mechanical properties of thin polysilicon films by means of probe microscopy. In: Materials and Device Characterization in Micromachining. Proceedings of SPIE. No.3512. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, pp. 66-75. ISBN 9780819429711. https://resolver.caltech.edu/CaltechAUTHORS:20180813-091037460

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