IC-processed micro-motors: design, technology, and testing
Micro-motors having rotors with diameters between 60 and 120 μm have been fabricated and driven electrostatically to continuous rotation. These motors were built using processes derived from IC (integrated circuit) microcircuit fabrication techniques. Initial tests on the motors show that friction plays a dominant role in their dynamic behavior. Observed rotational speeds have thus far been limited to several hundred r.p.m., which is a small fraction of what would be achievable if only natural frequency were to limit the response. Experimental starting voltages are at least an order of magnitude larger than had been expected (60 V at minimum and above 100 V for some structures). Observations of asynchronous as well as synchronous rotation between the driving fields and the rotors can be explained in terms of the torque/rotor-angle characteristics for the motors.
Additional Information© 1989 IEEE. Date of Current Version: 06 August 2002. We thank Profs. D.J. Angelakos, R.M. White, D. Giandomenico, and Paul T. Yang for valuable discussion, and K. Voros, R. Hamilton, and the staff of the Berkeley Microfabrication Laboratory for assistance in processing.
Published - TAImems89.pdf