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Published January 2004 | Published
Journal Article Open

Microfabrication of silicon–nitride micromesh bolometric detectors for Planck high frequency instrument


The high frequency instrument (HFI) on the National Aeronautics and Space Administration/European Space Agency Planck Surveyor, scheduled for launch in 2007, will map the entire sky in six frequency bands ranging from 100 to 857 GHz to probe cosmic microwave background anisotropy and polarization with angular resolution ranging from 9[prime] to 5[prime]. The HFI focal plane will contain 48 silicon–nitride micromesh bolometers operating from a 100 mK heat sink. Four detectors in each of the six bands will detect unpolarized radiation. An additional four pairs of detectors will provide sensitivity to linear polarization of emissions at 143, 217, and 353 GHz. We have fabricated and developed sensitive Si3N4 micromesh spider-web bolometers for submillimeter observation using microelectromechanical system techniques. The spiderweb architecture in this research provides high infrared absorption with minimal heat capacity and volume.

Additional Information

© 2004 American Vacuum Society. (Received 11 November 2002; accepted 24 November 2003; published 23 January 2004) This research was performed at the Jet Propulsion Laboratory, an operating division of the California Institute of Technology, under a contract with the National Aeronautics and Space Administration. Presented at the AVS 49th International Symposium, 4–8 November 2002, Denver, CO.

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