A New Multi-Site Probe Array with Monolithically Integrated Parylene Flexible Cable for Neural Prostheses
This work presents a new multi-site probe array applied with parylene technology, used for neural prostheses to record high-level cognitive neural signals. Instead of inorganic materials (e.g. silicon dioxide, silicon nitride), the electrodes and conduction traces on probes are insulated by parylene, which is a polymer material with high electrical resistivity, mechanical flexibility, biocompatibility and easy deposition process. As a result, the probes exhibit better electrical and mechanical properties. The all dry process is demonstrated to fabricate these probe arrays with monolithically integrated parylene flexible cables using double-side-polished (DSP) wafers. With the parylene flexible cables, the probes can be easily assembled to a high density 3-D array for chronic implantation.
Additional Information© 2005 IEEE. Manuscript received April 9, 2005. Date of Current Version: 10 April 2006. This work was supported by the National Institutes of Health. We would like to thank Mr. Trevor Roper for assistance with fabrication and the members of the Anderson lab at Caltech for help on vivo testing.