Local order measurement in SnGe alloys and monolayer Sn films on Si with reflection electron energy loss spectrometry

Measurements of local order are demonstrated in Sn-containing alloys and epitaxial monolayer thickness films by analysis of extended-edge energy loss fine structure (EXELFS) data obtained by reflection electron energy loss spectrometry (REELS). These measurements of short-range order provide a complement to the chemical information obtained with REELS and long-range order obtained using reflection high energy electron diffraction. The results suggest that EXELFS measurements are practical for samples mounted on the growth manipulator in a molecular beam epitaxy chamber. Advantages and limitations of reflection EXELFS are discussed.