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Published January 2002 | Published
Book Section - Chapter Open

Underwater shear-stress sensor


This paper reports the development of a micromachined, vacuum-cavity insulated, thermal shear-stress sensor for underwater applications. We focus on two major challenges for underwater shear-stress sensors: the waterproof coating and pressure sensitivity. It is found that thin-film CVD Parylene is a good waterproof material and sensors coated with 2 µm Parylene N can survive in water for at least one month at 55°C. It is also found that reducing the size and increasing the thickness of the sensor diaphragm are effective in minimizing the pressure sensitivity.

Additional Information

© 2002 IEEE. This project is supported by the Office of Naval Research through an SBIR grant and the NSF Center for Neuromorphic System Engineering at Caltech.

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