Parylene Accelerometer Utilizing Spiral Beams
This paper reports a Parylene accelerometer utilizing spiral beams. Since Parylene has intrinsic tensile stress, the resonant frequency ω_n of sensor structure is higher than that under no tensile stress. Considering the sensitivity of accelerometer is 1/ω_n^2 , the investigation of ω_n of a suspended structure supported by straight beams is carried out both theoretically and experimentally. As a result, it is proved that comparatively long beams are necessary for realizing the high sensitivity of a Parylene sensor with tensile stress. A spiral beam is effective for not only realizing a long beam in a limited space, but also realizing stress relaxation. Both Parylene accelerometer with straight beams and that with spiral beams are fabricated. Sensitivity of them is characterized, and the effectiveness of utilizing spiral beam is confirmed.
Additional Information© 2006 IEEE. This work was mainly supported by JSPS (Japan Society for the Promotion of Science).KAKENHI (16310103). This work was also partially supported by MEXT (Ministry of Education, Culture, Sports, Science and Technology). KAKENHI (17656090), "High-Tech Research Center" Project for Private Universities: Matching Fund Subsidy from MEXT, 2000-2004 and 2005-2009, the Kansai University Special Research Fund, 2004 and 2005.
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