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Published April 2011 | public
Journal Article

Progress in growth, fabrication, and characterization of semiconductor photonic crystal nanocavities


We present the results of recent investigations into the fabrication and characterization of high-Q, small mode volume one-dimensional photonic crystal nanobeam cavities in Si and two-dimensional photonic crystal slab nanocavities in GaAs. The nanobeam cavity modes are investigated in transmission by means of a microfiber taper loop apparatus. The spectral transmission profile of the cavity modes is investigated as a function of input polarization into the fiber. The Q of the cavity for different positions and orientations of the fiber taper is investigated. The results are compared to measurements by resonant scattering. The slab nanocavities are investigated by means of quantum dot photoluminescence excitation spectroscopy. We present recent progress in growth and fabrication of such slab nanocavities.

Additional Information

© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. Received 14 August 2010; accepted 18 September 2010; Published online 24 December 2010. The USA authors would like to acknowledge support (EEC-0812072) from the National Science Foundation (NSF) through the Engineering Research Center for Integrated Access Networks (CIAN). The Tucson group also acknowledges support from NSF Atomic Molecular and Optical Physics (AMOP) and Electronics, Photonics, and Device Technologies (EPDT), AFOSR, and Arizona Technology & Research Initiative Funding (TRIF). The Caltech authors gratefully acknowledge critical support and infrastructure provided for this work by the Kavli Nanoscience Institute at Caltech. H. M. G. thanks the Alexander von Humboldt Foundation for a Renewed Research Stay. A. H. appreciates the generous support of the ARCS Foundation.

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