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Published August 16, 2004 | public
Journal Article Open

Macroporous silicon membranes as electron and x-ray transmissive windows


Macroporous silicon membranes are fabricated whose pores are terminated with 60 nm thin silicon dioxide shells. The transmission of electrons with energies of 5 kV-25 kV through these membranes was investigated reaching a maximum of 22% for 25 kV. Furthermore, the transmission of electromagnetic radiation ranging from the far-infrared to the x-ray region was determined. The results suggest the application of the membrane as window material for electron optics and energy dispersive x-ray detectors.

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Copyright © 2004 American Institute of Physics. Received 9 February 2004; accepted 21 May 2004.


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