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Published November 1, 2002 | Published
Journal Article Open

Reflection high-energy electron diffraction analysis of polycrystalline films with grain size and orientation distributions


We report a computationally efficient algorithm to calculate reflection high-energy electron diffraction (RHEED) intensities from well-textured, small-grained polycrystalline films in the kinematic limit. We also show how the intensity maps of the spots in a RHEED pattern from such a film can be quantitatively analyzed to determine the film's average grain size, as well as its in-plane orientation and texture distributions. We find that the in-plane orientation and texture distribution widths of these films can be determined to within 1 degree and that the average lateral grain size can be measured to within a fraction of a nanometer after suitable calibration of our technique.

Additional Information

© 2002 American Institute of Physics. Received 24 June 2002; accepted 5 August 2002. This work was supported by the DARPA Virtual Integrated Prototyping program and ARO MURI on "Engineering Microstructural Complexity in Ferroelectric Thin Films," Grant No. DAAD 19-01-1-0517. One of us (R.T.B.) is grateful for support from the Intel Foundation.

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