Stress-Induced Variations in the Stiffness of Micro- and Nanocantilever Beams
Abstract
The effect of surface stress on the stiffness of cantilever beams remains an outstanding problem in the physical sciences. While numerous experimental studies report significant stiffness change due to surface stress, theoretical predictions are unable to rigorously and quantitatively reconcile these observations. In this Letter, we present the first controlled measurements of stress-induced change in cantilever stiffness with commensurate theoretical quantification. Simultaneous measurements are also performed on equivalent clamped-clamped beams. All experimental results are quantitatively and accurately predicted using elasticity theory. We also present conclusive experimental evidence for invalidity of the longstanding and unphysical axial force model, which has been widely applied to interpret measurements using cantilever beams. Our findings will be of value in the development of micro- and nanoscale resonant mechanical sensors.
Additional Information
© 2012 American Physical Society. Received 1 November 2011; published 5 June 2012. We would like to thank X. L. Feng, J. Xiang, and M. J. Lachut for useful suggestions and discussions. We would also like to thank E. Defaÿ, G. Le Rhun, and C. Marcoux from CEA-LETI for providing us with Aluminum Nitride material. L. G.V. acknowledges financial support from the European Commission (PIOF-GA-2008-220682) and Professor A. Boisen. J. E. S. acknowledges support from the Australian Research Council grants scheme.Attached Files
Published - Karabalin2012p18654Phys_Rev_Lett.pdf
Submitted - 1211.0302.pdf
Supplemental Material - LL12629_Supp_material_revised.pdf
Supplemental Material - README.TXT
Files
Additional details
- PMCID
- PMC3839317
- Eprint ID
- 32351
- DOI
- 10.1103/PhysRevLett.108.236101
- Resolver ID
- CaltechAUTHORS:20120711-110835143
- Marie Curie Fellowship
- PIOF-GA-2008-220682
- Professor A. Boisen
- Australian Research Council
- Created
-
2012-07-11Created from EPrint's datestamp field
- Updated
-
2021-11-09Created from EPrint's last_modified field