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Published January 2000 | Published
Book Section - Chapter Open

Mass flowmeter using a multi-sensor chip


We report here a novel mass flowmeter using a multisensor chip that includes a 1-D array of pressure, temperature and shear stress sensors. This shear stress sensor based flowmeter is capable of high sensitivity and wide measurement range. Our study also shows that the mass flowmeter using shear-stress sensors produces better resolution than that from pressure sensors in the laminar flow regime. Extensive tests have been carried out to evaluate the effects of overheat ratio, channel height and gas properties. We also find the V^2 ∝ τ^(1/3) law for conventional hot film sensors does not hold for our micromachined shear stress sensor.

Additional Information

© 2000 IEEE. This work is supported by JPL under account code 49-204-52000-0-3460. The authors would like to thank Shuyun Wu, Trevor Roper and Hung Bui for their help with the process, Xing Yang and Ellis Meng for their help with the paper.

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