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Published January 2016 | public
Book Section - Chapter

Parylene-on-oil packaging for implantable pressure sensors


This paper reports the feasibility study of a parylene-on-oil encapsulation packaging method of pressure sensors targeted for long-term implantation. Commercial barometric digital-output pressure sensors are enclosed in silicone oil and then encapsulated in situ with parylene-C or -D (PA-C, PA-D). Experimentally, sensors encapsulated with 30,000cSt silicone oil and 24.92??m PA-D show good performance for 6 weeks in 77??C saline with >99% of original sensitivity, corresponding to a predicted lifetime of around 21 months in 37??C saline according to the Arrhenius equation with an activation energy of ???0.6eV [1]. This work shows that, with proper designs, such a packaging method can preserve the original pressure sensor sensitivity without offset, validated throughout accelerated lifetime tests. A model to predict sensitivity retention after packaging is also presented.

Additional Information

© 2016 IEEE. Date Added to IEEE Xplore: 29 February 2016. The authors would like to thank Mr. Trevor Roper for his help on all the equipment at the Caltech MEMS Lab.

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