Published June 1, 1964 | Version public
Journal Article Open

Differing results obtained in the doping of semiconductors by energetic ions

Abstract

Conflicting results have been reported on the doping of semiconductors by energetic ions. The purpose of this communication is to call attention to certain experimental parameters which are important in resolving these discrepancies.

Additional Information

Copyright © 1964 American Institute of Physics. Received 12 December 1963.

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2090
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2006-03-07
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