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Published June 2003 | Published
Book Section - Chapter Open

Surface micromachined and integrated capacitive sensors for microfluidic applications


We have demonstrated an entire series of capacitive sensors using a multi-layer parylene/photoresist surface micromachining technology. The developed sensors are designed for total integration into parylene-based microfluidic systems for real-time system monitoring. Sensors have been demonstrated for the following applications: in-line pressure sensing (range: 0-35 kPa, resolution: 0.03 kPa); liquid front position and/or volumetric measurements (range: 0->50 pL, resolution: <5 pL); and dielectric measurements, which can be used to deduce fluid properties such as liquid composition. The reported sensor technology demonstrates versatility, high sensitivity, small footprints, and easy integration.

Additional Information

© 2003 IEEE. This work is supported in part by NSF ERC Center at Caltech (Grant No. EEC-9402726), NIH (Grant No. 5R01RR06217-10), and DARPA/MTO Bioflips Program.

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