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Published October 2011 | public
Book Section - Chapter

Ultra-High-Q Micro-Cavity on a Silicon Chip


Optical resonators with quality factor as high as 750 million are demonstrated. These silicon-chip-based devices are fabricated without silica reflow, thereby expanding the range of integration opportunities and possible applications.

Additional Information

© 2011 IEEE. Date of Current Version: 22 December 2011. This work was supported by DARPA.

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August 19, 2023
October 17, 2023