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Published May 2021 | Supplemental Material + Submitted
Journal Article Open

Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators


Driven by narrow-linewidth bench-top lasers, coherent optical systems spanning optical communications, metrology and sensing provide unrivalled performance. To transfer these capabilities from the laboratory to the real world, a key missing ingredient is a mass-produced integrated laser with superior coherence. Here, we bridge conventional semiconductor lasers and coherent optical systems using CMOS-foundry-fabricated microresonators with a high Q factor of over 260 million and finesse over 42,000. A five-orders-of-magnitude noise reduction in the pump laser is demonstrated, enabling a frequency noise of 0.2 Hz² Hz⁻¹ to be achieved in an electrically pumped integrated laser, with a corresponding short-term linewidth of 1.2 Hz. Moreover, the same configuration is shown to relieve the dispersion requirements for microcomb generation that have handicapped certain nonlinear platforms. The simultaneous realization of this high Q factor, highly coherent lasers and frequency combs using foundry-based technologies paves the way for volume manufacturing of a wide range of coherent optical systems.

Additional Information

© 2021 Nature Publishing Group. Received 06 July 2020; Accepted 07 January 2021; Published 11 February 2021. We acknowledge support from the Defense Advanced Research Projects Agency (DARPA) under the DODOS (HR0011-15-C-055) and APHI (FA9453-19-C-0029) programmes and Anello Photonics. Data availability: All data generated or analysed during this study are available within the paper and its Supplementary Information. Further source data will be made available on reasonable request. Code availability: The analysis codes will be made available on reasonable request. These authors contributed equally: Warren Jin, Qi-Fan Yang, Lin Chang, Boqiang Shen, Heming Wang. Author Contributions: The experiments were conceived by W.J., Q.-F.Y., L.C., B.S. and H.W. The devices were designed by W.J. and A.F. Measurements were performed by W.J., Q.-F.Y., L.C., B.S. and H.W., with assistance from M.A.L., L.W. and M.G. Analysis of the results was conducted by W.J., Q.-F.Y. and H.W. The project was coordinated by Q.-F.Y. and L.C. under the supervision of J.E.B., K.J.V. and M.P. All authors participated in writing the manuscript. The authors declare no competing interests. Peer review information: Nature Photonics thanks Andrey Matsko, Michael Watts and the other, anonymous, reviewer(s) for their contribution to the peer review of this work.


Jin, W., Yang, QF., Chang, L. et al. Publisher Correction: Hertz-linewidth semiconductor lasers using CMOS-ready ultra-high-Q microresonators. Nat. Photonics (2021). https://doi.org/10.1038/s41566-021-00805-y

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August 22, 2023
October 23, 2023