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Published June 1, 2013 | Published
Journal Article Open

Chip-scale fluorescence microscope based on a silo-filter complementary metal-oxide semiconductor image sensor

Abstract

We demonstrate a silo-filter (SF) complementary metal-oxide semiconductor (CMOS) image sensor for a chip-scale fluorescence microscope. The extruded pixel design with metal walls between neighboring pixels guides fluorescence emission through the thick absorptive filter to the photodiode of a pixel. Our prototype device achieves 13 μm resolution over a wide field of view (4.8  mm × 4.4  mm). We demonstrate bright-field and fluorescence longitudinal imaging of living cells in a compact, low-cost configuration.

Additional Information

© 2013 Optical Society of America. Received March 13, 2013; accepted April 8, 2013; posted April 16, 2013 (Doc. ID 186601); published May 21, 2013. This project is funded by the NIH under grant 1R01AI096226-01.

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August 19, 2023
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