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Published October 2007 | Published
Journal Article Open

Implantable micromechanical parylene-based pressure sensors for unpowered intraocular pressure sensing


This paper presents the first implantable, unpowered, parylene-based microelectromechanical system (MEMS) pressure sensor for intraocular pressure (IOP) sensing. From in situ mechanical deformation of the compliant spiral-tube structures, this sensor registers pressure variations without electrical or powered signal transduction of any kind. Micromachined high-aspect-ratio polymeric hollow tubes with different geometric layouts are implemented to obtain high-sensitivity pressure responses. An integrated device packaging method has been developed toward enabling minimally invasive suture-less needle-based implantation of the device. Both in vitro and ex vivo device characterizations have successfully demonstrated mmHg resolution of the pressure responses. In vivo animal experiments have also been conducted to verify the biocompatibility and functionality of the implant fixation method inside the eye. Using the proposed implantation scheme, the pressure response of the implant can be directly observed from outside the eye under visible light, with the goal of realizing convenient, direct and faithful IOP monitoring in glaucoma patients.

Additional Information

© Institute of Physics and IOP Publishing Limited 2007. Received 24 June 2007, in final form 17 July 2007. Published 31 August 2007. Print publication: Issue 10 (October 2007) This work was supported in part by the Engineering Research Center Program of the National Science Foundation under NSF award number EEC-0310723 and by Bausch and Lomb. The authors especially wish to thank Mr Tun Min Soe for his work on the three-dimensional models shown in figures 1 and 2 and Mr Trevor Roper for his fabrication assistance.

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