Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators
The authors observed resonances from multiple vibrational modes of individual silicon-carbide-based nanomechanical resonators, covering a broad frequency range from several megahertz to over a gigahertz. The devices are actuated thermoelastically in vacuum at room temperature using localized Joule heating in a device-integrated metal loop. Their motion is detected piezoresistively using signal downmixing in a similarly integrated metal piezoresistor. The frequencies and amplitudes of the observed resonant peaks are in good agreement with the results from theoretical modeling and finite-element simulations.
© 2007 American Institute of Physics. (Received 27 November 2006; accepted 22 January 2007; published online 28 February 2007) This work was supported by DARPA/MTO through MGA Grant No. NBCH1050001. The authors thank C.A. Zorman and M. Mehregany for providing them with the silicon carbide wafers. The authors also thank B. Gudlewski for helping them with e-beam writing.
Published - BARapl07.pdf