Welcome to the new version of CaltechAUTHORS. Login is currently restricted to library staff. If you notice any issues, please email coda@library.caltech.edu
Published July 6, 2005 | Published
Journal Article Open

Fabrication of a tungsten master stamp using self-ordered porous alumina


We describe the preparation of a tungsten pillar nanoimprint stamp without the use of lithography and etching techniques. Structures with heights of 15 nm were prepared on the basis of self-ordered porous alumina templates and this was followed by DC sputtering of tungsten. The stamp was successfully used to prepare an aluminium surface to obtain highly ordered porous anodic alumina films after a single anodization step. The preparation efficiency for highly ordered porous alumina was dramatically improved as compared to the more conventional two-step anodization–strip-anodization method, as a sacrificial layer with a thickness of a few hundred micrometres was not required. In addition, by fractal calculations, we have evaluated the degree of ordering of the asperities on the nanoimprint master stamp.

Additional Information

© 2005 IOP Publishing Ltd. Received 3 May 2005, in final form 25 May 2005. Published 6 July 2005. Print publication: Issue 9 (September 2005).

Attached Files

Published - CHOnanotech05.pdf


Files (925.7 kB)
Name Size Download all
925.7 kB Preview Download

Additional details

August 22, 2023
March 5, 2024