Published July 14, 1986 | Version Published
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Submicron silicon powder production in an aerosol reactor

Abstract

Powder synthesis by thermally induced vapor phase reactions is described. The powder generated by this technique consists of spherical, nonagglomerated particles of high purity. The particles are uniform in size, in the 0.1–0.2 µm size range. Most of the particles are crystalline spheres. A small fraction of the spheres are amorphous. Chain agglomerates account for less than 1% of the spherules.

Additional Information

© 1986 American Institute of Physics (Received 24 February 1986; accepted 19 May 1986) This work was supported in part by the Flat Plate Solar Array Project, Jet Propulsion Laboratory, California Institute of Technology sponsored by the U.S. Department of Energy through an agreement with NASA.

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Eprint ID
4719
Resolver ID
CaltechAUTHORS:WUJapl86

Funding

NASA/JPL/Caltech
Department of Energy (DOE)

Dates

Created
2006-09-05
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Updated
2023-04-18
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