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Published December 1989 | Published
Journal Article Open

Quantitative measurement of the composition of Al_xGa_(1−x)As heterostructures using a simple backscattered electron detector


We describe a technique for the quantitative measurement of composition in Al_xGa_(1−x)As heterostructures using a simple solid‐state backscattered electron detector in a scanning electron microscope. Calibration data are presented and are shown to be consistent with the Castaing [Adv. Electron. Electron Phys. 13, 317 (1960)] theory. The technique is applied to image representative Al_xGa_(1−x)As heterostructures including a graded index separate confinement heterostructure (GRINSCH) laser structure.

Additional Information

© 1989 American Institute of Physics. Received 19 June 1989; accepted for publication 31 August 1989. The authors would like to thank Lars Eng for supplying MBE material and growth calibration data. This work was supported by the Office of Naval Research and SDIO-ISTC. P.C.S. would like to acknowledge support under a NSF Graduate Fellowship.

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August 19, 2023
October 17, 2023