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Published August 28, 2002 | Submitted
Report Open

The Design and Implementation of a Reticle Maker for VLSI

Gray, Moshe


This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.

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Submitted - TR_4299.pdf


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August 19, 2023
January 13, 2024