The Design and Implementation of a Reticle Maker for VLSI
This paper describes the designing and building of a feedback controlled Reticle Maker for the VLSI industry. The machine is based on an innovative design of an XY photo plotter which utilizes flexures and linear motors as a means to raster scan a photographic plate. The accuracy of the machine is based on Laser Interferometery and feedback control.
Submitted - TR_4299.pdf