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Published September 2012 | public
Book Section - Chapter

Chemically-Etched Ultra-High-Q Micro-Cavities on a Silicon Chip


Optical resonators with quality factor as high as 875 million are demonstrated. These silicon-chip-based devices are fabricated using only lithography and chemical etching, thereby expanding integration opportunities and possible applications.

Additional Information

© 2012 IEEE. This work was supported by DARPA.

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August 19, 2023
October 23, 2023