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Published September 2012 | Version public
Book Section - Chapter Metadata-only

Chemically-Etched Ultra-High-Q Micro-Cavities on a Silicon Chip

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Abstract

Optical resonators with quality factor as high as 875 million are demonstrated. These silicon-chip-based devices are fabricated using only lithography and chemical etching, thereby expanding integration opportunities and possible applications.

Additional Information

© 2012 IEEE. This work was supported by DARPA.

Additional details

Identifiers

Eprint ID
37409
DOI
10.1109/IPCon.2012.6358592
Resolver ID
CaltechAUTHORS:20130308-094240934

Related works

Describes
10.1109/IPCon.2012.6358592 (DOI)

Funding

Defense Advanced Research Projects Agency (DARPA)

Dates

Created
2013-03-29
Created from EPrint's datestamp field
Updated
2022-04-13
Created from EPrint's last_modified field

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Other Numbering System Identifier
13149934