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Published November 2015 | Published
Journal Article Open

Fabrication of pyramidal probes with various periodic patterns and a single nanopore


The nanometer-scale patterned pyramidal probe with an electron beam-induced nanopore on the pyramid apex is an excellent candidate for an optical biosensor. The nanoapertures surrounded with various periodic groove patterns on the pyramid sides were fabricated using a focused ion beam technique, where the optical characteristics of the fabricated apertures with rectangular, circular, and elliptical groove patterns were investigated. The elliptical groove patterns on the pyramid were designed to maintain an identical distance between the grooves and the apex for the surface waves and, among the three patterns, the authors observed the highest optical transmission from the elliptically patterned pyramidal probe. A 103-fold increase of the transmitted optical intensity was observed after patterning with elliptical grooves, even without an aperture on the pyramid apex. The nanopore on the apex of the pyramid was fabricated using electron beam irradiation and was optically characterized.

Additional Information

© 2015 American Vacuum Society. Received 19 June 2015; accepted 28 October 2015; published 13 November 2015. This work was partially supported by the Korea Research Foundation Grant (KRF Grant No. 2012R1A1A2002880) and by the Global Research Laboratory funding (GRL; Nanoplasmonic Integrated Circuits for Ultrafast Information Processing, KRF Grant No. K20815000003-2008-00580). In addition, the authors would like to thank Kyung Jin Park (National Nanofabrication Center, Daejeon, Korea) for the groove pattern fabrication on pyramid.

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August 20, 2023
August 20, 2023