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Published October 1, 2007 | Published
Journal Article Open

Design and fabrication of segmented, slotted waveguides for electro-optic modulation


Recently, slotted waveguides have been used in conjunction with second order nonlinear optical polymers to provide a platform for electro-optic modulation at telecommunication frequencies. A challenge with these devices is the need to provide high-frequency electrical driving signals to the slots. The silicon resistivity must be high to reduce optical loss, and as a result electrical performance can be severely limited. We have designed and fabricated a class of waveguide that achieves quasicontinuous electrical contact with subwavelength segmentations and has low optical losses of 4 dB/cm, allowing both millimeter-wave and optical fields to be concentrated in the same area.

Additional Information

© 2007 American Institute of Physics. (Received 20 August 2007; accepted 12 September 2007; published online 1 October 2007) The authors gratefully acknowledge financial support from DARPA under the MORPH program and the NSF under the Materials and Devices for Information Technology Research center. The authors would also like to acknowledge Cornell Nanoscale Science and Technology Facility.

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