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Published September 15, 2020 | public
Journal Article

Greater than one billion Q factor for on-chip microresonators


High optical quality (Q) factors are critically important in optical microcavities, where performance in applications spanning nonlinear optics to cavity quantum electrodynamics is determined. Here, a record Q factor of over 1.1 billion is demonstrated for on-chip optical resonators. Using silica whispering-gallery resonators on silicon, Q-factor data is measured over wavelengths spanning the C/L bands (100 nm) and for a range of resonator sizes and mode families. A record low sub-milliwatt parametric oscillation threshold is also measured in 9 GHz free-spectral-range devices. The results show the potential for thermal silica on silicon as a resonator material.

Additional Information

© 2020 Optical Society of America. Provided under the terms of the OSA Open Access Publishing Agreement. Received 10 April 2020; revised 13 June 2020; accepted 6 August 2020; posted 6 August 2020 (Doc. ID 394940); published 11 September 2020. The authors thank H. Lee (KAIST), J. Liu and T. Kippenberg (EPFL), K. Yang (Stanford), and M. Suh (Caltech) for helpful discussions. Funding: Defense Advanced Research Projects Agency (HR0011-15-C-055, sub-award KK1540); Air Force Office of Scientific Research (FA9550-18-1-0353); Kavli Nanoscience Institute.

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August 19, 2023
October 20, 2023