Visible spectrum waveguiding in bulk CMOS

Creators: Sarkar, Debjit; Hajimiri, Ali¹

1. California Institute of Technology

Abstract

Waveguiding across the visible spectrum in an unmodified bulk CMOS chip is reported. The chip is fabricated in a standard CMOS process, and a simple wet etch removes metal in predetermined locations to expose glass rib waveguides. A modified Euler bend is introduced to improve bend radii by nearly an order of magnitude in the rib waveguides, and upper-bound losses are measured at visible wavelengths. These losses range from 6.2 dB/cm at 450 nm to 3.2 dB/cm at 650 nm and represent the lowest losses reported at visible wavelengths in unmodified bulk CMOS.

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Acknowledgement

This work was supported by the National Science Foundation Graduate Research Fellowship under Grant No. DGE-1745301. The authors also thank the following: Space Solar Power Project and Carver Mead New Adventures Fund for support, Muse Semiconductor for their tapeout services, and Craig Ives and Volkan Gurses for useful discussions.

Funding

NSF graduate fellowship (NSF Grant No. DGE‐1745301); Carver Mead New Adventures Fund; Space Solar Power Project.

Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

Conflict of Interest

The authors declare no conflicts of interest.

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