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Published January 10, 2007 | public
Journal Article

Efficient and Sensitive Capacitive Readout of Nanomechanical Resonator Arrays


Here we describe all-electronic broadband motion detection in radio frequency nanomechanical resonators. Our technique relies upon the measurement of small motional capacitance changes using an LC impedance transformation network. We first demonstrate the technique on a single doubly clamped beam resonator with a side gate over a wide range of temperatures from 20 mK to 300 K. We then apply the technique to accomplish multiplexed readout of an array of individually addressable resonators, all embedded in a single high-frequency circuit. This technique may find use in a variety of applications ranging from ultrasensitive mass and force sensing to quantum information processing.

Additional Information

© 2007 American Chemical Society. Received September 27, 2006. Revised Manuscript Received November 12, 2006. Publication Date (Web): December 6, 2006. We acknowledge fruitful conversations with Dr. A. Vandelay and Prof. E. von Nostrand. C.C.H. and K.L.E. acknowledge support from the U.S. NSF under grants nos. BES-216274 and CMS-324416.

Additional details

August 19, 2023
October 19, 2023