Determination of the yield properties of thin films using enhanced coherent gradient sensing

Abstract

This paper describes coherent gradient sensing (CGS) as an optical, full-field, real-time, nonintrusive, noncontact technique for measurement of curvature and curvature changes in single-layered and multilayered thin films deposited on substrates. The sensitivity of the basic CGS technique is enhanced using optical fringe multiplication to map curvature in very flat specimens (k ≤ 0.001 m^(−1)). Subsequently, this curvature measurement technique is applied to the determination of the yield properties of thin films subjected to cyclic thermomechanical loading.

Additional Information

© Society for Experimental Mechanics, Inc. 2001. Original manuscript submitted: October 2, 2000. Final manuscript received: May 10, 2001. We would like to acknowledge the financial support through the Jet Propulsion Laboratory's (JPL) Center for Integrated Space Mierosystems, System on a Chip program. Many helpful discussions with Dr. E. Kolawa, Dr. S. Kayali and Dr. U. Lieneweg of JPL are also acknowledged.

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