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Published January 2008 | Published
Book Section - Chapter Open

Implantable parylene-based wireless intraocular pressure sensor


This paper presents a novel implantable, wireless, passive pressure sensor for ophthalmic applications. Two sensor designs incorporating surface-micromachined variable capacitor and variable capacitor/inductor are implemented to realize the pressure sensitive components. The sensor is monolithically microfabricated using parylene as a biocompatible structural material in a suitable form factor for increased ease of intraocular implantation. Pressure responses of the microsensor are characterized on-chip to demonstrate its high pressure sensitivity (> 7000 ppm/mmHg) with mmHg level resolution. An in vivo animal study verifies the biostability of the sensor implant in the intraocular environment after more than 150 days. This sensor will ultimately be implanted at the pars plana or iris of the eye to fulfill continuous intraocular pressure (IOP) monitoring in glaucoma patients.

Additional Information

© 2008 IEEE. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation (Award Number EEC-0310723) and part by Bausch and Lomb. The authors especially thank Dr. Rajat Agrawal and Dr. Rohit Varma for their valuable comments on surgical procedures, and Mr. Trevor Roper for his fabrication assistance.

Attached Files

Published - Chen2008p8557Mems_2008_21St_Ieee_International_Conference_On_Micro_Electro_Mechanical_Systems_Technical_Digest.pdf



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