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Published January 2006 | Published
Book Section - Chapter Open

Platinum Black Electroplated Impedance Particle Sensor


We present a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media are in excellent agreement with model analysis. Signals from individual 10 µm polystyrene beads passing the sensing electrodes are successfully obtained.

Additional Information

© 2006 IEEE. Issue Date: 18-21 Jan. 2006, Date of Current Version: 19 March 2007. This work is supported by NASA through National Space Biomedical Research Institute (NSBRI). The co-operative agreement number is NCC 9-58-317. The authors would like to thank other members of the Caltech Micromachining Laboratory for their valuable assistance.

Attached Files

Published - Zheng2006p91322006_1St_Ieee_International_Conference_On_NanoMicro_Engineered_And_Molecular_Systems_Vols_1-3.pdf



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