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Published July 2007 | Published
Book Section - Chapter Open

Soft lithographic fabrication of microresonators


Using ultra-high-Q toroid microcavity masters, soft lithography is applied to fabricate polymer microcavity arrays with Q factors in excess of 10^6. This technique produces resonators with material-limited quality factors.

Additional Information

© Copyright 2007 IEEE. Reprinted with permission. Publication Date: 23-25 July 2007. The authors would like to thank Stevens Martin at AOC for the Vicast polymer resin used in this work. This work was supported by DARPA and the Caltech Lee Center. A.M.A is supported by a Clare Boothe Luce postdoctoral fellowship.

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