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Published June 2012 | Submitted + Supplemental Material
Journal Article Open

Chemically etched ultrahigh-Q wedge-resonator on a silicon chip


Ultrahigh-Q optical resonators are being studied across a wide range of fields, including quantum information, nonlinear optics, cavity optomechanics and telecommunications. Here, we demonstrate a new resonator with a record Q-factor of 875 million for on-chip devices. The fabrication of our device avoids the requirement for a specialized processing step, which in microtoroid resonators8 has made it difficult to control their size and achieve millimetre- and centimetre-scale diameters. Attaining these sizes is important in applications such as microcombs and potentially also in rotation sensing. As an application of size control, stimulated Brillouin lasers incorporating our device are demonstrated. The resonators not only set a new benchmark for the Q-factor on a chip, but also provide, for the first time, full compatibility of this important device class with conventional semiconductor processing. This feature will greatly expand the range of possible 'system on a chip' functions enabled by ultrahigh-Q devices.

Additional Information

© 2012 Nature Publishing Group, a division of Macmillan Publishers Limited. Received 30 November 2011; Accepted 13 April 2012; Published online 20 May 2012. The authors acknowledge support from the Defense Advanced Research Projects Agency under the iPhoD and Orchid programmes and also the Kavli Nanoscience Institute at Caltech. H.L. acknowledges support from the Center for the Physics of Information, and S.J. thanks the Kwanjeong Educational Foundation. Author contributions: All authors made important contributions. H.L., T.C. and J.L. performed measurements and modelling, and contributed equally to the work. H.L. performed microfabrication of devices with assistance from T.C. and K.Y. AFM measurements were performed by H.L. and S.J. The experiments were conceived, designed and planned by H.L., T.C., J.L., O.P. and K.J.V. All authors helped to write the manuscript. The authors declare no competing financial interests.

Attached Files

Submitted - 1112.2196v1.pdf

Supplemental Material - nphoton.2012.109-s1.pdf


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August 19, 2023
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