Published May 6, 2002
| Published
Journal Article
Open
Rapid biaxial texture development during nucleation of MgO thin films during ion beam-assisted deposition
- Creators
- Brewer, Rhett T.
-
Atwater, Harry A.
Abstract
We propose a mechanism for the nucleation of highly aligned biaxially textured MgO on amorphous Si3N4 during ion beam-assisted deposition. Using transmission electron microscopy, reflection high-energy electron diffraction, energy dispersive x-ray analysis, and ellipsometery, we have observed that highly aligned biaxially textured grains emerge from a "diffraction-amorphous" film when the film thickens from 3.5 to 4.5 nm. Transmission electron microscopy dark-field images also show the onset of rapid grain growth during this same film thickness interval. These results suggest biaxial texturing through aligned solid phase crystallization.
Additional Information
© 2002 American Institute of Physics. Received 8 February 2002; accepted 5 March 2002. This work was supported by the DARPA VIP III program, ARO MURI Grant No. DAAD 19-01-1-0517, and the Intel Foundation.Attached Files
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Additional details
- Eprint ID
- 3829
- Resolver ID
- CaltechAUTHORS:BREapl02
- Defense Advanced Research Projects Agency (DARPA)
- DAAD 19-01-1-0517
- Army Research Office (ARO)
- Intel Foundation
- Created
-
2006-07-13Created from EPrint's datestamp field
- Updated
-
2021-11-08Created from EPrint's last_modified field