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Published January 2000 | Published
Book Section - Chapter Open

A check-valved silicone diaphragm pump


Two generations of check-valved silicone rubber diaphragm pumps are presented. Significant improvements have been made from pump to pump including the design and fabrication of a double-sided check valve, a bossed silicone membrane, and silicone gaskets. Water flow rates of up to 13 ml/min and a maximum back pressure of 5.9 kPa were achieved through pneumatic operation with an external compressed air source. Using a custom designed solenoid actuator, flow rates of up to 4.5 ml/min and a maximum back pressure of 2.1 kPa have been demonstrated.

Additional Information

© 2000 IEEE. This work is supported by the DARPA MICROFLUMES program under Naval Ocean Systems Center Contract N66001-96-C-83632. The authors would like to thank Mr. Charles Grosjean and Dr. Qiao Lin for helpful discussions; Mr. Tuan Hoang for help with testing and proofreading; and Dr. Thomas Tsao, Mr. Trevor Roper, and Mr. Hung Bui for assistance with fabrication.

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