A parylene MEMS flow sensing array
We have demonstrated the first parylene MEMS thermal sensor array capable of detecting small flows down to 0.5 µl/min. The device is fabricated using low-temperature parylene/platinum technology and consists of metallic sensors suspended on a membrane over a bulk micromachined silicon channel. For the first time, insightful results from three different methods of flow sensing using a single device are studied and compared. Multi-mode testing using hot film, calorimetric, and time-of-flight techniques at low overheat ratios has been performed. Thus, this device is biocompatible in both construction and operation.
Additional Information© 2003 IEEE. This work was funded in part by the Engineering Research Centers Program of the National Science Foundation under Award Number EEC-9402726. We would like to thank Mr Trevor Roper for assistance in fabrication and Mr. Tuan Hoang for help with experiments and proofreading.
Published - 01215566.pdf