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Published January 2008 | Published
Book Section - Chapter Open

Floating-disk parylene microvalve for self-regulating biomedical flow controls


A novel self-regulating parylene micro valve is presented in this paper with potential applications for biomedical flow controls. Featuring a free-floating bendable valve disk and two-level valve seat, this surface-micromachined polymeric valve accomplishes miniature pressure/flow rate regulation in a band-pass profile stand-alone without the need of power sources or active actuation. Experimental data of underwater testing results have successfully demonstrated that the microfabricated in-channel valve can regulate water flow at 0-80 mmHg and 0-10 µL/min pressure/flow rate level, which is perfectly suitable for biomedical and lab-on-a-chip applications. For example, such biocompatible microvalve can be incorporated in ocular implants for control of eye fluid drainage to fulfill intraocular pressure (IOP) regulation in glaucoma patients.

Additional Information

© 2008 IEEE. This work was supported in part by the Engineering Research Centers Program of the National Science Foundation under NSF Award Number EEC-0310723. The authors would also like to thank Mr. Trevor Roper for his fabrication assistance.

Attached Files

Published - Chen2008p8524Mems_2008_21St_Ieee_International_Conference_On_Micro_Electro_Mechanical_Systems_Technical_Digest.pdf



Additional details

August 19, 2023
October 20, 2023