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Published 2013 | public
Book Section - Chapter

Micro/Nano Patterened Integrated Electrochemical Sensors for Implantable Applications


Electrochemical sensors are important candidates for autonomous integrated sensing applications. Such sensors can provide accurate and long-term measurements of multiple analyte for applications in complex environments e.g. in body fluids. As such sensors are made smaller and need to be fully integrated, special approaches need to be taken in order to achieve functional sensitivity, stability, and longevity. Here, we provide details of CMOS compatible, integrated design and fabrication of these sensors on very small scales using micro/nano scale fabrication and surface modification techniques. We also present in situ functionalization and novel interface design techniques. We also provide a comparison between integrated reference electrodes fabricated using CMOS compatible fabrication techniques. Finally, we show examples of sensing Glucose and DNA concentration in biological samples.

Additional Information

© 2013 CRC Press. The authors would like to thank Sanofi Aventis for providing financial support for this work under the grant #D09/4502653189. Authors would also like to thank the Kavli Nanoscience Institute (KNI) at Caltech for providing the fabrication facilities for this work.

Additional details

August 19, 2023
March 5, 2024