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Published January 8, 2014 | Supplemental Material
Journal Article Open

Scalable Method for the Fabrication and Testing of Glass-Filled, Three-Dimensionally Sculpted Extraordinary Transmission Apertures


This Letter features a new, scalable fabrication method and experimental characterization of glass-filled apertures exhibiting extraordinary transmission. These apertures are fabricated with sizes, aspect ratios, shapes, and side-wall profiles previously impossible to create. The fabrication method presented utilizes top-down lithography to etch silicon nanostructures. These nanostructures are oxidized to provide a transparent template for the deposition of a plasmonic metal. Gold is deposited around these structures, reflowed, and the surface is planarized. Finally, a window is etched through the substrate to provide optical access. Among the structures created and tested are apertures with height to diameter aspect ratios of 8:1, constructed with rectangular, square, cruciform, and coupled cross sections, with tunable polarization sensitivity and displaying unique properties based on their sculpted side-wall shape. Transmission data from these aperture arrays is collected and compared to examine the role of spacing, size, and shape on their overall spectral response. The structures this Letter describes can have a variety of novel applications from the creation of new types of light sources to massively multiplexed biosensors to subdiffraction limit imaging techniques.

Additional Information

© 2013 American Chemical Society. Published In Issue: January 08, 2014; Article ASAP: December 10, 2013; Just Accepted Manuscript: December 05, 2013; Received: October 31, 2013; Revised: November 27, 2013. The authors declare no competing financial interest. Detailed fabrication methodology and a video of the polarization sensitivity shown in Figure 4. This material is available free of charge via the Internet at http://pubs.acs.org. This work was supported by the Advanced Energy Consortium under the BEG10-07 grant, the Boeing corporation under the CT-BA-GTA-1 grant, and by the National Science Foundation under the NSF CIAN ERC (EEC-0812072) grant. S.W. thanks W. Fegadolli, E. Nelson-Clark, and R. E. Moses for useful discussion during the preparation of this manuscript and Lou Nelson for his tireless and knowledgeable support. The authors also thank the staff of the Kavli Nanoscience Institute for their continued help.

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Supplemental Material - nl4040576_si_001.pdf

Supplemental Material - nl4040576_si_002.avi


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