Microsensors and actuators for macrofluidic control
Microsensors and actuators suitable for macrofluidic control have been designed, fabricated, tested, and optimized over the span of the last decade. MEMS-based shear stress sensor arrays using polysilicon hot filaments have been fabricated on both rigid (silicon) and flexible (parylene) substrate for application on all types of fluid dynamic and aerodynamic surfaces. In addition, MEMS bubble flap-type pneumatic actuators have been tested and used in turbulent boundary layer drag reduction in conjunction with the rigid MEMS shear stress sensor arrays acting as high-speed shear stress imagers. The flexible MEMS bubble actuator arrays have also been used with the flexible shear stress sensor arrays for generating maneuvering forces in the wind tunnel for a delta wing model and on UAV-type radio-controlled aircraft.
Additional Information© 2004 IEEE. Manuscript received September 2, 2003; revised March 24, 2004. This work was supported in part by the U.S. Department of Defense, Defense Advanced Projects Agency (Micro Technology Office), in part by the Air Force Office of Scientific Research (Multidisciplinary University Research Initiative), and in part by the NASA Dryden. The authors would like to thank all of those involved in the TBL and VSC experiments (numbering over 20 researchers) due to the long-term work of these two projects, spanning over almost a decade.
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